Microcathode sustained discharges using Si integrated micro-reactors

Laurent Schwaederlé (1) , Mukesh Kulsreshath (1) , Lawrence J. Overzet (2) , Remi Dussart (1) , Philippe Lefaucheux (1) , Olivier Aubry (1) , Pierre Ranson (1)

1 GREMI - Groupe de recherches sur l'énergétique des milieux ionisés
2 PAL - Plasma Application Laboratory

Domaines: Physique des plasmas [physics.plasm-ph]

Laurent Schwaederlé, Mukesh Kulsreshath, Lawrence J. Overzet, Remi Dussart, Philippe Lefaucheux, et al.. Microcathode sustained discharges using Si integrated micro-reactors. 18th International Colloquium on Plasma Processes (CIP), Jul 2011, Nantes, France. ⟨hal-00707929⟩