Characterisation of Silicon based micro discharge plasma arrays in Direct Current (DC) at atmospheric pressure

Mukesh Kulsreshath (1) , Laurent Schwaederlé (1) , Philippe Lefaucheux (1) , Thomas Tillocher (1) , Julien Ladroue (1) , Olivier Aubry (1) , Pierre Ranson (1) , Lawrence J. Overzet (2) , Remi Dussart (1)

1 GREMI - Groupe de recherches sur l'énergétique des milieux ionisés
2 PAL - Plasma Application Laboratory

Domaines: Physique des plasmas [physics.plasm-ph]

Mukesh Kulsreshath, Laurent Schwaederlé, Philippe Lefaucheux, Thomas Tillocher, Julien Ladroue, et al.. Characterisation of Silicon based micro discharge plasma arrays in Direct Current (DC) at atmospheric pressure. 6th International Workshop on Microplasmas, Apr 2011, Paris, France. ⟨hal-00707925⟩