On the direct bonding of two silicon surfaces

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https://hal.archives-ouvertes.fr/hal-00694144
Contributor : Frédéric Lebon <>
Submitted on : Thursday, May 3, 2012 - 3:55:27 PM
Last modification on : Friday, April 5, 2019 - 8:18:27 PM

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  • HAL Id : hal-00694144, version 1

Citation

Natacha Cocheteau, Frédéric Lebon, Iulian Rosu, Sonia Ait Zaid, Hélène Combes, et al.. On the direct bonding of two silicon surfaces. Colloque Euromech 514 New Trends in Contact Mechanics, Mar 2012, Cargese, France. ⟨hal-00694144⟩

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