Quality and exposure control in semiconductor manufacturing. Part II:Evaluation
Résumé
The purpose of this article is to test the performance of a heuristic algorithm that computes a quality control plan. The objective of the tests reported in this paper is twofold: (1) to compare the proposed heuristic algorithm (HA) to an optimal allocation (OA) method; and (2) to analyse the behaviour and limitations of the proposed HA on a scale-1 test with a before/after test.