Optimisation of the process control in a semiconductor company: model and case study of defectivity sampling

M'Hammed Sahnoun (1) , Samuel Bassetto (1) , Michel Tollenaere (1) , Philippe Vialletelle (2) , Soidri Bastoini (2)

1 G-SCOP_SIREP - Système d’Information, conception RobustE des Produits
2 ST-CROLLES - STMicroelectronics [Crolles]

This article studies the skip, under some assumptions, of process control operations. The case of one tool, one enhanced buffer and one metrology tool of a monotonic parameter is analysed. This article presents circumstances in which control plan can be optimised due to the buffer's behaviour. After discussing the industrial issue of defectivity, this article presents a literature review followed by the model and steps towards industrial development. Then demonstrator, which is applied at a case study of defectivity sampling, is presented. A test of over a 300-mm wafer fabrication data set shows serious improvements - around 35% of defectivity controls have been skipped compared to the static sampling plan.

Mots clés: process control; dynamic control plan; risk measurement; defectivity measurement

Domaines: Automatique / Robotique

M'Hammed Sahnoun, Samuel Bassetto, Michel Tollenaere, Philippe Vialletelle, Soidri Bastoini. Optimisation of the process control in a semiconductor company: model and case study of defectivity sampling. International Journal of Production Research, 2011, Vol. 49 (No. 13), pp.3873-3890. ⟨10.1080/00207543.2010.484429⟩. ⟨hal-00676970⟩