Tunable resonators in the low kHz range for viscosity sensing

Martin Heinisch (1) , Erwin Reichel (2) , Isabelle Dufour (3) , Bernhard Jakoby (1)

1 Institute for Microelectronics and Microsensors
2 Center for Surface Science and Catalysis,
3 IMS - Laboratoire de l'intégration, du matériau au système

This contribution gives an overview of the design and development of miniaturized, tunable resonating viscosity sensors in the low kHz range incorporating first modeling approaches as well as experimental results. The eect of dierent designs, potential improvements in the setups as well as the eect of cross sensitivities are discussed and outlined.

Mots clés: viscosity; mass density; sensor; frequency; Lorentz forces

Domaines: Micro et nanotechnologies/Microélectronique

Martin Heinisch, Erwin Reichel, Isabelle Dufour, Bernhard Jakoby. Tunable resonators in the low kHz range for viscosity sensing. Sensors and Actuators A: Physical , 2012, 186, pp.111-117. ⟨10.1016/j.sna.2012.03.009⟩. ⟨hal-00676516⟩