Modelling, Identification and Control of a Micro-cantilever Array

Abstract : This book presents how concepts from dynamical control systems can be applied to the development of very small-scale systems and will benefit researchers, engineers and students.
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https://hal.archives-ouvertes.fr/hal-00676344
Contributor : Sarah Djaouti <>
Submitted on : Monday, March 5, 2012 - 10:41:30 AM
Last modification on : Friday, July 6, 2018 - 3:06:08 PM

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  • HAL Id : hal-00676344, version 1

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M. Lenczner, N. Ratier, E. Pillet, S. Cogan, H. Hui, et al.. Modelling, Identification and Control of a Micro-cantilever Array. Micro, Nanosystems and Systems on Chips - Modeling, Control and Estimation, Voda, Alina, pp.2-25, 2010. ⟨hal-00676344⟩

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