Modelling of capacitively coupled radio-frequency discharges in nitrogen.

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https://hal.archives-ouvertes.fr/hal-00669173
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Submitted on : Saturday, February 11, 2012 - 7:29:41 PM
Last modification on : Tuesday, May 14, 2019 - 11:01:50 AM

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  • HAL Id : hal-00669173, version 1

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L. Marques, C. D. Pintassilgo, Grégoire Alcouffe, Guy Cernogora, L. L. Alves. Modelling of capacitively coupled radio-frequency discharges in nitrogen.. 29th ICPIG (International Conference on the Physics of Ionized Gases), Jul 2009, Cancun, Mexico. ⟨hal-00669173⟩

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