Microfabrication And Thermal Behavior Of Miniature Cesium-Vapor Cells For Atomic Clock Operations

Abstract : We report on the microfabrication and packaging of Cs-vapor cells filled with Ne or Ar for micro atomic clocks (MACs) based on the coherent population trapping (CPT). We present a two-step anodic bonding process to control the cell atmosphere for long-term operation of MACs. Furthermore, the results of thermal analysis of a cell embedded in the physical package are shown in order to discuss the optimal design of the package for the thermal management of the MAC.
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https://hal.archives-ouvertes.fr/hal-00660585
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Submitted on : Tuesday, January 17, 2012 - 10:23:34 AM
Last modification on : Friday, July 6, 2018 - 3:06:08 PM

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M. Hasegawa, R.K. Chutani, C. Gorecki, R. Boudot, P. Dziuban, et al.. Microfabrication And Thermal Behavior Of Miniature Cesium-Vapor Cells For Atomic Clock Operations. 24th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Jan 2011, Cancun, Mexico. pp.712-715, ⟨10.1109/MEMSYS.2011.5734524⟩. ⟨hal-00660585⟩

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