Effect of HCl on the Doping and Shape Control of Silicon Nanowires

P. Gentile (1) , N. Pauc (1) , F. Oehler (1) , V. Calvo (1) , A. Solanki (1) , G. Rosaz (2, 1) , B. Salem (2) , T. Baron (2)

1 SiNaps - Silicon Nanoelectronics Photonics and Structures
2 LTM - Laboratoire des technologies de la microélectronique

Domaines: Matière Condensée [cond-mat]; Science des matériaux [cond-mat.mtrl-sci]

P. Gentile, N. Pauc, F. Oehler, V. Calvo, A. Solanki, et al.. Effect of HCl on the Doping and Shape Control of Silicon Nanowires. MRS Spring meeting, Apr 2011, San Francisco, United States. ⟨hal-00650234⟩