Introduction of Zr in nanometric periodic Mg/Co multilayers

Abstract : We study the introduction of a third material, namely Zr, within a nanometric periodic Mg/Co structure designed to work as optical component in the extreme UV (EUV) spectral range. Mg/Co, Mg/Zr/Co, Mg/Co/Zr and Mg/Zr/Co/Zr multilayers are designed, then characterized in terms of structural quality and optical performances through X-ray and EUV reflectometry measurements respectively. For the Mg/Co/Zr structure, the reflectance value is equal to 50% at 25.1 nm and 45° of grazing incidence and reaches 51.3% upon annealing at 200°C. Measured EUV reflectivity values of tri-layered systems are discussed in terms of material order within a period and compared to the predictions of the theoretical model of Larruquert. Possible applications are pointed out.
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Contributeur : Philippe Jonnard <>
Soumis le : vendredi 18 novembre 2011 - 17:08:20
Dernière modification le : lundi 12 août 2019 - 12:26:01
Archivage à long terme le : dimanche 19 février 2012 - 02:30:32


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K. Le Guen, M.-H. Hu, J.-M. André, Philippe Jonnard, S.-K. Zhou, et al.. Introduction of Zr in nanometric periodic Mg/Co multilayers. Applied Physics A Solids and Surface, Springer-Verlag, 2011, 102, pp.69. ⟨10.1007/s00339-010-6093-2⟩. ⟨hal-00642789⟩



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