Micro-Cantilever Anemometer for Cryogenic Helium
Résumé
We present a new anemometer for liquid helium, based on a micro-cantilever. Our aim was to design a probe significatively smaller than one millimeter and that can be used both above and below the superfluid transition at T_lambda~2.17 K. This sensor, including its bearing arms, is fully micro-machined using ''Deep Reactive Ion Etching'' techniques on a silicon wafer. This lets us choose the geometry of the arms to make them as little invasive as possible. The deflection of the cantilever, which reflects the local fluid velocity, is probed using a niobium superconducting LC resonator, with a critical temperature Tc~9K.
Origine : Fichiers produits par l'(les) auteur(s)
Loading...