Trigate 6T SRAM scaling to 0.06 μm2

M. Guillorn , J. Chang , A. Pyzyna , S. Engelmann , E. Joseph , B. Fletcher , C. Cabral Jr. , C.-H. Lin , A. Bryant , Maxime Darnon (1) , J. Ott , C. Lavoie , M. Frank , L. Gignac , J. Newbury , Chen Wang , D. Klaus , E. Kratschmer , J. Bucchignano , B. To , W. Graham , I. Lauer , E. Sikorski , S. Carter , V. Narayanan , N. Fuller , Y. Zhang , W. Haensch

1 LTM - Laboratoire des technologies de la microélectronique

M. Guillorn, J. Chang, A. Pyzyna, S. Engelmann, E. Joseph, et al.. Trigate 6T SRAM scaling to 0.06 μm2. Proceeding of 2009 International Electron Devices Meeting, IEDM 2009, Dec 2009, San Francisco, United States. ⟨hal-00625310⟩