Bias controlled electrostrictive longitudinal resonance in X-cut lithium niobate thin films resonator

M. Pijolat (1) , C. Deguet (1) , C. Billard (1) , D. Mercier (1) , A. Reinhardt (1) , M. Aïd (1) , S. Ballandras (2) , E. Defaÿ (1)

1 CEA-LETI - Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information
2 FEMTO-ST - Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174)

In this letter, we show that a longitudinal acoustic wave can be generated in X-cut LiNbO(3) (LNO) thin films when a voltage bias is superimposed to the radio frequency signal. Although there is normally no coupling of this wave in X-cut LNO, its electrostrictive behavior combined with bias reaching 3.9 MV/cm induces an electromechanical coupling around 11%. This experiment was performed without acoustic isolation with the LNO substrate (high overtone bulk acoustic resonator configuration).

Domaines: Acoustique [physics.class-ph]

M. Pijolat, C. Deguet, C. Billard, D. Mercier, A. Reinhardt, et al.. Bias controlled electrostrictive longitudinal resonance in X-cut lithium niobate thin films resonator. Applied Physics Letters, 2011, 98 (23), pp.232902. ⟨10.1063/1.3598410⟩. ⟨hal-00611487⟩