Temperature Compensated Radio-Frequency Harmonic Bulk Acoustic Resonators

Abstract : In this paper, we present a new approach for the fabrication and use of thinned single crystal films for the development of radio-frequency temperature compensated devices. We particularly focus on High-overtone bulk acoustic resonators (HBAR) for oscillator stabilization, taking advantage of the very high quality factors achievable with such devices. We obtained a good agreement between simulation and experiments. This paper shows the possibility to obtain device which is intrinsically low sensitive to thermal effects, and even allowing a second order compensation thanks to the Quartz thermal stability.
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Submitted on : Friday, March 18, 2011 - 4:10:39 PM
Last modification on : Friday, July 6, 2018 - 3:06:08 PM

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  • HAL Id : hal-00578213, version 1

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T. Baron, D. Gachon, G. Martin, S. Alzuaga, D. Hermelin, et al.. Temperature Compensated Radio-Frequency Harmonic Bulk Acoustic Resonators. 2010 IEEE International Frequency Control Symposium, Jun 2010, New Port Beach, United States. pp.652-655. ⟨hal-00578213⟩

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