Tailoring strain in the SrTiO3 compound by low-energy He+ irradiation

S. Autier-Laurent (1, 2) , O. Plantevin (3) , P. Lecoeur (1) , B. Decamps (3) , A. Gentils (3) , C. Bachelet (3) , O. Kaitasov (3) , Gianguido Baldinozzi (4, 5)

1 IEF - Institut d'électronique fondamentale
2 LPS - Laboratoire de Physique des Solides
3 CSNSM - Centre de Spectrométrie Nucléaire et de Spectrométrie de Masse
4 SPMS - Laboratoire Structures, Propriétés et Modélisation des solides
5 LA2M - Laboratoire d'Analyse Microstructurale des Matériaux

The ability to generate a change of the lattice parameter in a near-surface layer of a controllable thickness by ion implantation of strontium titanate is reported here using low-energy He+ ions. The induced strain follows a distribution within a typical near-surface layer of 200 nm as obtained from structural analysis. Due to the clamping effect from the underlying layer, only perpendicular expansion is observed. Maximum distortions up to 5–7% are obtained with no evidence of amorphisation at fluences of 1016 He+ ions/cm2 and ion energies in the range 10–30 keV.

Domaines: Matériaux; Science des matériaux [cond-mat.mtrl-sci]

S. Autier-Laurent, O. Plantevin, P. Lecoeur, B. Decamps, A. Gentils, et al.. Tailoring strain in the SrTiO3 compound by low-energy He+ irradiation. EPL - Europhysics Letters, 2010, pp.36005. ⟨10.1209/0295-5075/92/36005⟩. ⟨hal-00549936⟩