Off-Axis Electron Holography for Field Mapping in the semiconductor Industry

Abstract : There is a need in the semiconductor industry for characterisation techniques that can be used to map electronic, magnetic and strain fields with nanometre-scale resolution. Here we show that off-axis electron holography is a transmission electron microscope-based technique that can be used to quantitatively map these fields for a range of different specimens
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Article dans une revue
Microscopy and Microanalysis, Cambridge University Press (CUP), 2010, 24 (5), pp.7
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https://hal.archives-ouvertes.fr/hal-00508681
Contributeur : Aurélien Masseboeuf <>
Soumis le : jeudi 5 août 2010 - 10:38:03
Dernière modification le : vendredi 5 février 2016 - 11:14:31

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  • HAL Id : hal-00508681, version 1

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David Cooper, Béché Armand, Martien Den Hertog, Aurélien Masseboeuf, Jean-Luc Rouviere, et al.. Off-Axis Electron Holography for Field Mapping in the semiconductor Industry. Microscopy and Microanalysis, Cambridge University Press (CUP), 2010, 24 (5), pp.7. 〈hal-00508681〉

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