Simple and rapid method to fabricate organic microcantilevers based on a sacrificial layer technique

Georges Dubourg (1) , Ludivine Fadel-Taris (1) , Isabelle Dufour (1) , Bernard Plano (1) , Karsten Haupt (2) , Claude Pellet (1) , Cédric Ayela (1)

1 IMS - Laboratoire de l'intégration, du matériau au système
2 GEC - Génie Enzymatique et Cellulaire

Domaines: Micro et nanotechnologies/Microélectronique

Georges Dubourg, Ludivine Fadel-Taris, Isabelle Dufour, Bernard Plano, Karsten Haupt, et al.. Simple and rapid method to fabricate organic microcantilevers based on a sacrificial layer technique. MNE 2010, 36th International Conference on Micro & Nano Engineering, 2010, Genoa, Italy. 1 page. ⟨hal-00507538⟩