Bifurcation topology tuning of a mixed behavior in nonlinear micromechanical resonators

Najib Kacem (1) , Sebastien Hentz (2)

1 LaMCoS - Laboratoire de Mécanique des Contacts et des Structures [Villeurbanne]
2 D2NT - Département Nanotec

We report the experimental observation of a four-bifurcation-point (or five possible amplitudes for a given frequency) behavior of electrostatically actuated micromechanical resonators, called the mixed (first hardening then softening) behavior. We also demonstrate both analytically and experimentally tuning the bifurcation topology of this behavior via an electrostatic mechanism. An analytical model allows for the qualitative as well as quantitative explanation of the experiments and serves as a simple tool for design of nonlinear micromechanical devices under high drive.

Domaines: Génie mécanique [physics.class-ph]; Génie mécanique [physics.class-ph]

Najib Kacem, Sebastien Hentz. Bifurcation topology tuning of a mixed behavior in nonlinear micromechanical resonators. Applied Physics Letters, 2009, 95 (18), 3 p. ⟨10.1063/1.3258654⟩. ⟨hal-00505099⟩