Electron Probe Microanalysis of Thin Films and Multilayers Using the Computer Program XFILM

Abstract : XFILM is a computer program for determining the thickness and composition of thin films on Substrates and multilayers by electron probe microanalysis. In this study, we describe the X-ray emission model implemented in the latest version of XFILM and assess its reliability by comparing measured and calculated k-ratios from thin-film samples available in the literature. We present and discuss examples of applications of XFILM that illustrate the capabilities of the program.
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https://hal.archives-ouvertes.fr/hal-00475542
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Submitted on : Thursday, April 22, 2010 - 10:42:09 AM
Last modification on : Tuesday, August 13, 2019 - 2:24:01 PM

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Xavier Llovet, Claude Merlet. Electron Probe Microanalysis of Thin Films and Multilayers Using the Computer Program XFILM. Microscopy and Microanalysis, Cambridge University Press (CUP), 2010, 16, pp.21-32. ⟨10.1017/S1431927609991218⟩. ⟨hal-00475542⟩

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