Pseudo-periodic patterns for subpixel accuracy visual control: principle, pattern designs, and performances

J. Galeano Zea (1) , P. Sandoz (1)

1 FEMTO-ST - Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174)

A vision system is used for measuring in-plane target displacement, position and orientation. Pseudo-periodic patterns fixed on the target forms a phase reference. Absolute position is determined with subpixel accuracy by phase computations. Various position encoding designs are proposed for different displacement ranges and resolution. Performances obtained are compared and discussed for both displacement and orientation measurements. The capability to resolve position on depth ranges larger than the lens depth of focus is demonstrated.

Domaines: Optique / photonique

J. Galeano Zea, P. Sandoz. Pseudo-periodic patterns for subpixel accuracy visual control: principle, pattern designs, and performances. SPIE Europe Optical Metrology, Jun 2009, Munich, Germany. ⟨10.1117/12.827485⟩. ⟨hal-00472309⟩