Molecular dynamics simulations of the solid phase epitaxy of Si : growth mechanism and orientation effects

E. Lampin (1) , Christophe Krzeminski

1 IEMN - Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520

Domaines: Sciences de l'ingénieur [physics]

E. Lampin, Christophe Krzeminski. Molecular dynamics simulations of the solid phase epitaxy of Si : growth mechanism and orientation effects. Journal of Applied Physics, 2009, 106, pp.063519-1-8. ⟨10.1063/1.3211972⟩. ⟨hal-00471990⟩