Application of the Kriging method to the reconstruction of ellipsometric signature

Lekbir Afraites (1) , Jérôme Hazart (2) , Patrick Schiavone (1)

1 LTM - Laboratoire des technologies de la microélectronique
2 CEA-LETI - Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information

The inverse problem in scatterometry which consists in determining the feature shape from an experimental ellipsometric signature is very difficult to solve. On one hand, the problem is ill-posed; on the other hand, due to equipment limitation and the presence of noise in the measurement, the number of experimental signature acquisition is limited to a few measurements. The efficient resolution of the inverse problem requires a more comprehensive signature. To deal with this problem, we use a new approach based on the Kriging interpolation method to enrich the number of usable data. This method is inherently providing the best linear unbiased optimal estimation.

Domaines: Micro et nanotechnologies/Microélectronique

Lekbir Afraites, Jérôme Hazart, Patrick Schiavone. Application of the Kriging method to the reconstruction of ellipsometric signature. Microelectronic Engineering, 2009, 86 (4-6), pp.1033-1035. ⟨10.1016/j.mee.2009.01.049⟩. ⟨hal-00462226⟩