Periodic patterning using multi-facet prism based laser interference lithography
Résumé
This paper discusses and present simple wavefront interference concept, using multi facet prisms and UV laser, to pattern periodic micro-features. Fabrication of square lattice features employing a biprism is illustrated. This concept is extended employing three facet prisms to fabricate hexagonal lattice structures. These micro-features are expected to find tunable photonic crystal applications.