Formation of Columnar MicroStructures of silicon (CMS) in SF6/O2 plasma in cryogenic conditions

Jeremy Pereira (1) , Remi Dussart (1) , Laurianne E. Pichon (1) , Vincent L. Girault (1) , Philippe Lefaucheux (1) , Mohamed Boufnichel (2) , Pierre Ranson (1)

1 GREMI - Groupe de recherches sur l'énergétique des milieux ionisés
2 ST-CROLLES - STMicroelectronics [Crolles]

Domaines: Physique des plasmas [physics.plasm-ph]

Jeremy Pereira, Remi Dussart, Laurianne E. Pichon, Vincent L. Girault, Philippe Lefaucheux, et al.. Formation of Columnar MicroStructures of silicon (CMS) in SF6/O2 plasma in cryogenic conditions. 17th International Colloquium on Plasma Processes, Jun 2009, Marseille, France. ⟨hal-00444402⟩