Depth dependent local structures in thin films unraveled by grazing incidence x-ray absorption spectroscopy

Narcizo M. Souza-Neto (1, 2) , Aline Y. Ramos (3) , Hélio C. N. Tolentino (4) , Alessandro Martins (5) , Antonio D. Santos (2)

1 LNLS - Laboratório Nacional de Luz Sìncrotron
2 DFMT - Dept. de Física dos Materiais e Mecânica
3 NEEL - MRS - Matériaux, Rayonnements, Structure
4 NEEL - CRG - CRG & Grands instruments
5 IF-UFG - Instituto de Física

A method of using X-ray absorption spectroscopy (XAS) together with resolved grazing incidence geometry for depth profiling atomic, electronic or chemical local structures in thin films is presented. The quantitative deconvolution of thickness-dependent spectral features is performed by fully considering both scattering and absorption formalisms. Surface oxidation and local structural depth profiles in nanometric FePt films are determined, exemplifying the application of the method.

Domaines: Science des matériaux [cond-mat.mtrl-sci]

Narcizo M. Souza-Neto, Aline Y. Ramos, Hélio C. N. Tolentino, Alessandro Martins, Antonio D. Santos. Depth dependent local structures in thin films unraveled by grazing incidence x-ray absorption spectroscopy. Journal of Applied Crystallography, 2009, 42 (6), pp.1158-1164. ⟨10.1107/S0021889809042678⟩. ⟨hal-00443710⟩