Structural and optical properties of Si nanocrystals embedded in SiO2/SiNx multilayers

F. Delachat; Marzia Carrada; G. Ferblantier; A. Slaoui; Caroline Bonafos; Sylvie Schamm-Chardon; H. Rinnert

Journal Articles Physica E: Low-dimensional Systems and Nanostructures Year : 2009

Structural and optical properties of Si nanocrystals embedded in SiO2/SiNx multilayers

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1

F. Delachat

Function : Author

Institut d'Electronique du Solide et des Systèmes

Marzia Carrada

Function : Author
PersonId : 18629
IdHAL : marzia-carrada
ORCID : 0000-0001-8828-6805
IdRef : 071507515

Institut d'Electronique du Solide et des Systèmes

G. Ferblantier

Function : Author

Institut d'Electronique du Solide et des Systèmes

A. Slaoui

Function : Author

Institut d'Electronique du Solide et des Systèmes

Caroline Bonafos

Function : Author
PersonId : 19831
IdHAL : caroline-bonafos
ORCID : 0000-0001-5140-6690
IdRef : 071508147

Sylvie Schamm-Chardon

Function : Author
PersonId : 18555
IdHAL : sylvie-schamm-chardon
ORCID : 0000-0001-5534-8475
IdRef : 143045121

CV

H. Rinnert

Function : Author

Domains

Micro and nanotechnologies/Microelectronics

Marie-Anne Jung : Connect in order to contact the contributor

https://hal.science/hal-00408918

Submitted on : Tuesday, August 4, 2009-1:58:48 PM

Last modification on : Friday, March 24, 2023-2:52:52 PM

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hal-00408918 , version 1 (04-08-2009)

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HAL Id : hal-00408918 , version 1

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F. Delachat, Marzia Carrada, G. Ferblantier, A. Slaoui, Caroline Bonafos, et al.. Structural and optical properties of Si nanocrystals embedded in SiO2/SiNx multilayers. Physica E: Low-dimensional Systems and Nanostructures, 2009, 41, pp. 994-997. ⟨hal-00408918⟩

Structural and optical properties of Si nanocrystals embedded in SiO2/SiNx multilayers

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