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Effect of physical defect on shmoos in CMOS DSM technologies

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https://hal.archives-ouvertes.fr/hal-00401309
Contributor : Frédéric Darracq <>
Submitted on : Thursday, July 2, 2009 - 6:47:36 PM
Last modification on : Thursday, July 25, 2019 - 4:34:15 PM

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  • HAL Id : hal-00401309, version 1

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A. Machouat, G. Haller, V. Goubier, Dean Lewis, Philippe Perdu, et al.. Effect of physical defect on shmoos in CMOS DSM technologies. Microelectronics Reliability, Elsevier, 2008, 48, pp.1333-1338. ⟨hal-00401309⟩

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