Impact of ULK restoration techniques on propagation performance for interconnects of the 45 nm technology node and below

M. Gallitre (1) , B. Blampey (1) , H. Chaabouni , A. Farcy (2) , P. Grosgeorges , T. Lacrevaz (1) , C. Bermond (1) , B. Fléchet (1) , P. Ancey (3)

1 IMEP-LAHC - Institut de Microélectronique, Electromagnétisme et Photonique - Laboratoire d'Hyperfréquences et Caractérisation
2 STMicroelectronics
3 ST-CROLLES - STMicroelectronics [Crolles]

Domaines: Electromagnétisme

M. Gallitre, B. Blampey, H. Chaabouni, A. Farcy, P. Grosgeorges, et al.. Impact of ULK restoration techniques on propagation performance for interconnects of the 45 nm technology node and below. 12th IEEE Signal Propagation on Interconnects, May 2008, -, France. ⟨hal-00397907⟩