Thickness and substrate effects on AlN thin film growth at room temperature

B. Abdallah (1) , C. Duquenne (1) , Marie-Paule Besland (1) , E. Gautron (1) , Pierre-Yves Jouan , Pierre-Yves Tessier (1) , J. Brault , Y. Cordier , M. A. Djouadi (1)

1 IMN - Institut des Matériaux Jean Rouxel

Domaines: Science des matériaux [cond-mat.mtrl-sci]

B. Abdallah, C. Duquenne, Marie-Paule Besland, E. Gautron, Pierre-Yves Jouan, et al.. Thickness and substrate effects on AlN thin film growth at room temperature. European Physical Journal: Applied Physics, 2008, 43 (3), pp.309. ⟨10.1051/epjap:2008082⟩. ⟨hal-00396579⟩