A fast and accurate computation of interconnect capacitance

Sylvie Putot (1) , François Charlet (1) , Patrick Witomski (2)

1 CEA-LETI - Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information
2 LMC - IMAG - Laboratoire de Modélisation et Calcul

We present a new simulation tool for efficient extraction of 3D capacitance matrix in interconnect structures embedded in a multilayered dielectric environment. We use a fictitious domain method, which replaces the initial problem on a complex geometry by a problem on a simple shape domain embedding the initial domain, and is consequently ideally suited for the treatment of complex geometries. Numerical results confirm that this method is more efficient, both in CPU time and memory, than a finite elements or a boundary elements method.

Domaines: Equations aux dérivées partielles [math.AP]

Sylvie Putot, François Charlet, Patrick Witomski. A fast and accurate computation of interconnect capacitance. International Electron Devices Meeting 1999, Dec 1999, Washington, D.C, United States. pp.893-896, ⟨10.1109/IEDM.1999.824292⟩. ⟨hal-00388397⟩