A robust control method for electrostatic microbeam dynamic shaping with capacitive detection

Chady Kharrat (1) , Eric Colinet (1) , Alina Voda (2)

1 LMEA - Laboratoire MEMS et Electronique Associée
2 GIPSA-SLR - GIPSA - Systèmes linéaires et robustesse

A robust closed-loop control and observation methodology for an electrostatic dynamic shaping of a microbeam using N small separate electrodes is described. After decomposing the displacements vector on the n eigenmodes using the modal analysis, n controllers are designed to control the dynamic coefficients of each mode and thus to deliver the stresses that must be distributed throughout the beam. In previous works, we considered direct access to non noisy displacement measurements. In this paper, we investigate the capacitive measurement of the local displacements done by each small electrode, which gives a noisy readout. Robust control methodology applied on extended standard model permits to design n observers associated to n controllers and guarantees precise shape tracking, free from noise and robust against parameters incertitude

Mots clés: robust control; LTR; poles placement; microstructures control; modal analysis

Domaines: Micro et nanotechnologies/Microélectronique

Chady Kharrat, Eric Colinet, Alina Voda. A robust control method for electrostatic microbeam dynamic shaping with capacitive detection. IFAC WC 2008 - 17th IFAC World Congress, Jul 2008, Séoul, South Korea. pp.568-573. ⟨hal-00371310⟩