Pseudorandom BIST for test and characterization of linear and nonlinear MEMS

A. Dhayni (1) , Salvador Mir (1) , Libor Rufer (1) , Ahcène Bounceur (1) , Emmanuel Simeu (1)

1 TIMA - Techniques de l'Informatique et de la Microélectronique pour l'Architecture des systèmes intégrés

In this paper we study the use of the pseudorandom (PR) technique for test and characterization of linear and nonlinear devices, in particular for micro electro mechanical systems (MEMS). The PR test technique leads to a digital built-in-self-test (BIST) technique that is accurate in the presence of parametric variations, noise tolerant, and has high-quality test metrics. We will describe the use of the PR test technique for testing linear and nonlinear MEMS, where impulse response samples of the device under test are considered to verify its functionality. Next, we illustrate and evaluate the application of this technique for linear and nonlinear MEMS characterization.

Mots clés: bist; test

Domaines: Micro et nanotechnologies/Microélectronique

A. Dhayni, Salvador Mir, Libor Rufer, Ahcène Bounceur, Emmanuel Simeu. Pseudorandom BIST for test and characterization of linear and nonlinear MEMS. Microelectronics Journal, 2008, 40 (7), pp.1054-1061. ⟨10.1016/j.mejo.2008.05.012⟩. ⟨hal-00367218⟩