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Microswitch with mixed piezoelectric and electrostatic actuation

Abstract : In this article, a new concept of microswitch is investigated with the objective to decrease the actuation voltage. It consists in a component with two kinds of actuation mechanisms: piezoelectric actuation and electrostatic actuation. The structures were realized with a technology compatible with CMOs technology. Aluminium nitride (AIN) was selected as piezoelectric material for its maturity and integration capabilities.
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https://hal.archives-ouvertes.fr/hal-00346154
Contributor : Jean-François Manceau Connect in order to contact the contributor
Submitted on : Thursday, December 11, 2008 - 10:41:13 AM
Last modification on : Thursday, January 13, 2022 - 12:00:10 PM

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  • HAL Id : hal-00346154, version 1

Citation

Francois Chapuis, Emmanuel Defay, Fabrice Casset, Jean-François Manceau, Francois Bastien, et al.. Microswitch with mixed piezoelectric and electrostatic actuation. 14th International Conference on Solid-State Sensors, Actuators and Microsystems, Jun 2007, LYON, France. pp.U584-U585. ⟨hal-00346154⟩

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