Structural investigations of YSZ coatings prepared by DC magnetron sputtering

Pascal Briois (1) , Frédéric Lapostolle (1) , Valérie Demange (2) , Elisabeth Djurado (3) , Alain Billard (1)

1 LERMPS - Laboratoire LERMPS
2 LSGS - Laboratoire de science et génie des surfaces
3 LEPMI - Laboratoire d'Electrochimie et de Physico-chimie des Matériaux et des Interfaces

(ZrO₂)_1–x(Y₂O₃)x thin films were sputter-deposited from metallic targets in various reactive argon–oxygen gas mixtures. Structural investigations have been realised by X-ray Diffraction (XRD), Raman spectroscopy and Transmission Electron Microscopy (TEM). The coatings microstructure have been characterised by TEM and their morphology by Scanning Electron Microscopy (SEM) on brittle-fracture cross sections. Chemical compositions have been achieved by Electron Probe Micro-Analysis (EPMA) and by Energy Dispersive Spectroscopy (EDS). Finally, attention was paid to the film optical properties, as assessed via Optical Transmission Interferometry (OTI) as well as spectrophotometry.

Mots clés: Reactive magnetron sputtering; YSZ; Structure; ZrO₂

Domaines: Matériaux

Pascal Briois, Frédéric Lapostolle, Valérie Demange, Elisabeth Djurado, Alain Billard. Structural investigations of YSZ coatings prepared by DC magnetron sputtering. Surface and Coatings Technology, 2007, 201 (12), pp. 6012-6018. ⟨10.1016/j.surfcoat.2006.11.016⟩. ⟨hal-00333834⟩