Influence of the process parameters on the ESD synthesis of thin film YSZ electrolytes
Résumé
This paper presents the results of a process optimisation study applied to the synthesis of thin 8YSZ films by electrostatic spray deposition (ESD). The goal was to obtain thin, dense and continuous 8YSZ coatings. Starting from a zirconium acetylacetonate in ethanol – butyl carbitol solution as precursor, the influence of the main process parameters – substrate temperature, nozzle to substrate distance and solution flow rate – has been studied. The microstructure has been characterised by SEM imagery. The study allowed us to define a three dimensional domain of optimal values of the process parameters where dense and thin doped zirconia coatings were obtained for the employed nozzle geometry and solution concentration.