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A Method to Measure Beam Deflections in different Resonance Modes Piezoresistively and its Incorporation into 2D Optical µ- scanners

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https://hal.archives-ouvertes.fr/hal-00283361
Contributor : Sylvie Garcia <>
Submitted on : Thursday, May 29, 2008 - 5:08:22 PM
Last modification on : Monday, May 17, 2021 - 12:00:04 PM

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  • HAL Id : hal-00283361, version 1

Citation

H. Muro, T. Oki, A. Asaoka, Tarik Bourouina, Gilbert Reyne, et al.. A Method to Measure Beam Deflections in different Resonance Modes Piezoresistively and its Incorporation into 2D Optical µ- scanners. IEEJ, Trans.SM, 2007, 127 (1). ⟨hal-00283361⟩

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