A Method to Measure Beam Deflections in different Resonance Modes Piezoresistively and its Incorporation into 2D Optical µ- scanners

Document type :
Journal articles
Liste complète des métadonnées

https://hal.archives-ouvertes.fr/hal-00283361
Contributor : Sylvie Garcia <>
Submitted on : Thursday, May 29, 2008 - 5:08:22 PM
Last modification on : Thursday, February 7, 2019 - 2:21:46 PM

Identifiers

  • HAL Id : hal-00283361, version 1

Citation

H. Muro, T. Oki, A. Asaoka, Tarik Bourouina, Gilbert Reyne, et al.. A Method to Measure Beam Deflections in different Resonance Modes Piezoresistively and its Incorporation into 2D Optical µ- scanners. IEEJ, Trans.SM, 2007, 127 (1). ⟨hal-00283361⟩

Share

Metrics

Record views

136