KTa0.5Nb0.5O3 ferroelectric thin films: processing, characterization and application to microwave agile devices

Vincent Laur (1) , Arnaud-Gides Moussavou (2) , Anthony Rousseau (3) , Paul Laurent (1) , Gérard Tanné (1) , Valérie Bouquet (3) , Maryline Guilloux-Viry (3) , Fabrice Huret (1)

1 LEST - Laboratoire d'Electronique et Systèmes de Télécommunications
2 IETR - Institut d'Électronique et des Technologies du numéRique
3 LCSIM - Laboratoire de Chimie du solide et inorganique moléculaire

This paper is aimed at demonstrating the high capabilities of KTa0.5Nb0.5O3 thin films for microwave agility applications. Tunable capacitors, resonators and phase shifters were realized with KTN materials. Their high frequency measurements showed, in particular, the very high tuning factors of these films under quite low electric field.

Mots clés: Ferroelectrics; Interdigital Capacitors; Phase Shifters; Stub Resonators; Thin Films

Domaines: Electromagnétisme

Vincent Laur, Arnaud-Gides Moussavou, Anthony Rousseau, Paul Laurent, Gérard Tanné, et al.. KTa0.5Nb0.5O3 ferroelectric thin films: processing, characterization and application to microwave agile devices. 2008. ⟨hal-00276991⟩