Structural study of nanoporous ultra low-k dielectrics using complementary techniques: ellipsometric porosimetry, X-ray reflectivity and grazing incidence small-angle X-ray scattering - Archive ouverte HAL Accéder directement au contenu
Article Dans Une Revue Applied Surface Science Année : 2007

Structural study of nanoporous ultra low-k dielectrics using complementary techniques: ellipsometric porosimetry, X-ray reflectivity and grazing incidence small-angle X-ray scattering

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hal-00206321 , version 1 (17-01-2008)

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  • HAL Id : hal-00206321 , version 1

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V. Jousseaume, G. Rolland, D. Babonneau, J.P. Simon. Structural study of nanoporous ultra low-k dielectrics using complementary techniques: ellipsometric porosimetry, X-ray reflectivity and grazing incidence small-angle X-ray scattering. Applied Surface Science, 2007, 254, pp.473-479. ⟨hal-00206321⟩

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