A microcantilever chemical sensors optimization by taking into account losses

Abstract : The current trend in increasing microcantilever resonant frequencies leads to relatively low quality factors for microcantilevers resonating in a gas medium. In order to increase the quality factor of such high-frequency microcantilevers, an approach that takes into account the different types of losses is provided to specify appropriate values of microcantilever aspect ratios (length to thickness, width to thickness). Conventional values of aspect ratios result in low quality factors, while those proposed here lead to slightly higher values of quality factor.
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  • HAL Id : hal-00203738, version 1

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Frédéric Lochon, Isabelle Dufour, Dominique Rebiere. A microcantilever chemical sensors optimization by taking into account losses. Sensors and Actuators B: Chemical, Elsevier, 2006, 118, pp.292-296. ⟨hal-00203738⟩

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