Direct printing photolithography for the realization of acoustic wave sensors

Complete list of metadatas

https://hal.archives-ouvertes.fr/hal-00184355
Contributor : Ims Import <>
Submitted on : Wednesday, October 31, 2007 - 9:00:33 AM
Last modification on : Tuesday, February 27, 2018 - 11:18:01 PM

Identifiers

  • HAL Id : hal-00184355, version 1

Citation

Irène Esteban, Corinne Dejous, Dominique Rebiere, Jacques Pistre. Direct printing photolithography for the realization of acoustic wave sensors. 11th European Frequency and Time Forum (EFTF'97), 1997, Switzerland. pp.1. ⟨hal-00184355⟩

Share

Metrics

Record views

121