Acoustic Love wave platform with PDMS microfluidic chip

Vincent Raimbault (1) , Dominique Rebiere (1) , Corinne Dejous (1) , Matthieu Guirardel (2) , Véronique Conédéra (3)

1 IMS - Laboratoire de l'intégration, du matériau au système
2 LOF - Laboratoire du Futur
3 LAAS - Laboratoire d'analyse et d'architecture des systèmes

This paper exhibits a microfluidic solution to allow Love wave acoustic oscillators working under highly viscous liquid environments. Attenuation caused by viscous coupling is limited by using a poly(dimethylsiloxane) (PDMS) chip bonded on the Love wave device. Liquid volume required for a measurement is thus minimized to the microliter order. Thanks to insertion losses decrease, the non-Newtonian behavior of silicone oils up to 30 Pa s can be observed in oscillator mode. Numerical simulations based on the transfer matrix method have been performed to modelize the sensor response.

Domaines: Micro et nanotechnologies/Microélectronique

Vincent Raimbault, Dominique Rebiere, Corinne Dejous, Matthieu Guirardel, Véronique Conédéra. Acoustic Love wave platform with PDMS microfluidic chip. Sensors and Actuators A: Physical , 2008, 142 (1), pp.160-165. ⟨10.1016/j.sna.2007.05.026⟩. ⟨hal-00183746⟩