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Intra-IC Inspection and Metrology with Picosecond Laser Ultrasonics

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https://hal.archives-ouvertes.fr/hal-00182901
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Submitted on : Monday, October 29, 2007 - 1:11:02 PM
Last modification on : Thursday, October 4, 2018 - 11:14:07 AM

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  • HAL Id : hal-00182901, version 1

Citation

Grégory Andriamonje, Vincent Pouget, Yves Ousten, Dean Lewis, Pascal Fouillat, et al.. Intra-IC Inspection and Metrology with Picosecond Laser Ultrasonics. 22nd IEEE Instrumentation and Measurement Technology Conference (IMTC) 2005, 2005, Canada. pp.1. ⟨hal-00182901⟩

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