Love-wave acoustic sensors and silicon microcantilevers : a coupled approach to characterize polymer thin films

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https://hal.archives-ouvertes.fr/hal-00182218
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Submitted on : Thursday, October 25, 2007 - 10:39:50 AM
Last modification on : Friday, April 5, 2019 - 12:06:01 PM

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  • HAL Id : hal-00182218, version 1

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Dominique Rebiere, Isabelle Dufour, Céline Zimmermann, Corinne Dejous, Jacques Pistre. Love-wave acoustic sensors and silicon microcantilevers : a coupled approach to characterize polymer thin films. 20th symposium on microelectronics technology and devices SBMicro 2005, 2005, Brazil. pp.1. ⟨hal-00182218⟩

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