Scanning laser ultrasonics experiments for in-situ non-destructive analysis of integrated circuits

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https://hal.archives-ouvertes.fr/hal-00181926
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Submitted on : Wednesday, October 24, 2007 - 4:46:41 PM
Last modification on : Thursday, October 4, 2018 - 11:14:07 AM

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  • HAL Id : hal-00181926, version 1

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Grégory Andriamonje, Vincent Pouget, Yves Ousten, Dean Lewis, Bernard Plano, et al.. Scanning laser ultrasonics experiments for in-situ non-destructive analysis of integrated circuits. IEEE Transactions on Device and Material Reliability, 2005, 1, pp.1. ⟨hal-00181926⟩

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