Complete phononic bandgaps and bandgap maps in two-dimensional silicon phononic crystal plates
Résumé
Using a plane wave expansion (PWE) method, the band structure of a silicon (Si) phononic crystal slab with periodically etched vertical holes is obtained. It is found that a complete frequency gap is present in certain crystalline configurations for elastic phonons in delicately chosen crystal geometries. This new finding is very important due to the CMOS compatibility of the fabrication of these structures that makes deployment of phononic crystals capabilities with the electronic and photonic functionalities on the same Si substrate possible.