RF MEMS series capacitive switch: test and diagnosis

H.N. Nguyen (1) , Libor Rufer (1) , Emmanuel Simeu (1) , Salvador Mir (1)

1 TIMA - Techniques de l'Informatique et de la Microélectronique pour l'Architecture des systèmes intégrés

This paper introduces a study of the method linking low frequency test and high frequency test by using regression-based techniques for low cost testing of RF MEMS switch. A modelling of RF MEMS switches is constructed to test and diagnose their functionality. The basic idea is to apply a low frequency test to the RF MEMS device and to automatically extract the high frequency characteristics from the low ones. Validation results obtained on a RF MEMS series capacitive switch are encouraging. An evaluation of the feasibility of implementing a built-in-test based on the proposed approach is presented.

Mots clés: MEMS; test

Domaines: Micro et nanotechnologies/Microélectronique

H.N. Nguyen, Libor Rufer, Emmanuel Simeu, Salvador Mir. RF MEMS series capacitive switch: test and diagnosis. Journées GDR SoC-SiP, Jun 2007, Paris, France. ⟨hal-00173253⟩