New screen-printed MEMS fabrication process : feasibility of thermal microactuator

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https://hal.archives-ouvertes.fr/hal-00164615
Contributor : Isabelle Dufour <>
Submitted on : Saturday, July 21, 2007 - 5:46:26 PM
Last modification on : Thursday, January 11, 2018 - 6:21:07 AM

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  • HAL Id : hal-00164615, version 1

Citation

Claude Lucat, Patrick Ginet. New screen-printed MEMS fabrication process : feasibility of thermal microactuator. GDR MicroNanoSystèmes, Oct 2006, Lille, France. ⟨hal-00164615⟩

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