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Communication Dans Un Congrès Année : 2007

New sacrificial layer based screen-printing process for free-standing thick-films applied to MEMS

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hal-00164501 , version 1 (20-07-2007)

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  • HAL Id : hal-00164501 , version 1

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Claude Lucat, Patrick Ginet, Francis Ménil. New sacrificial layer based screen-printing process for free-standing thick-films applied to MEMS. IMAPS/ACerS 3rd International Conference on Ceramic Interconnect and Ceramic Microsystems Technologies, Apr 2007, Denver, United States. ⟨hal-00164501⟩
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