New sacrificial layer based screen-printing process for free-standing thick-films applied to MEMS

Type de document :
Communication dans un congrès
IMAPS/ACerS 3rd International Conference on Ceramic Interconnect and Ceramic Microsystems Technologies, Apr 2007, Denver, United States. xx, 2007
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https://hal.archives-ouvertes.fr/hal-00164501
Contributeur : Isabelle Dufour <>
Soumis le : vendredi 20 juillet 2007 - 15:29:25
Dernière modification le : jeudi 11 janvier 2018 - 06:21:07

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  • HAL Id : hal-00164501, version 1

Citation

Claude Lucat, Patrick Ginet, Francis Ménil. New sacrificial layer based screen-printing process for free-standing thick-films applied to MEMS. IMAPS/ACerS 3rd International Conference on Ceramic Interconnect and Ceramic Microsystems Technologies, Apr 2007, Denver, United States. xx, 2007. 〈hal-00164501〉

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