Lithium ion conducting lithium sulfur oxynitride thin film

K.-H. Joo (1) , H.-J. Sohn (1) , Philippe Vinatier (2) , Brigitte Pecquenard (2) , Alain Levasseur (2)

1 Research Center for Energy Conversion and Storage
2 ICMCB - Institut de Chimie de la Matière Condensée de Bordeaux

hin-film solid electrolytes, lithium sulfur oxynitride (Lison), were fabricated by radio-frequency (rf) magnetron sputtering under various gas compositions. Composition of the thin film was determined by atomic absorption spectroscopy, Rutherford backscattering spectroscopy, and energy-dispersive X-ray spectrometry...

Mots clés: Lithium sulfate; Magnetron sputtering; Stability; Ionic conductivity; Ionic conductors; Microstructure Reactive sputtering; Solid electrolyte

Domaines: Matériaux

K.-H. Joo, H.-J. Sohn, Philippe Vinatier, Brigitte Pecquenard, Alain Levasseur. Lithium ion conducting lithium sulfur oxynitride thin film. Electrochemical and Solid-State Letters, 2004, 7 (8), pp.A256-A258. ⟨10.1149/1.1769317⟩. ⟨hal-00150337⟩